1. Institute of Solid State Physics, Russian Academy of Science, Chernogolovka 142432, Russia
2. Moscow Institute of Physics and Technology (MIPT), State University, 9 Institutskiy per., Dolgoprudny, Moscow Region 141700, Russia
3. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 6, Academician Ossipyan str., Chernogolovka, Moscow Region 142432, Russia
4. National University of Science and Technology “MISiS,” 4, Leninsky pr., Moscow 119049, Russia