Laser etching of LiNbO3in a Cl2atmosphere
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341934
Reference19 articles.
1. Guided-wave devices for optical communication
2. Guided-wave devices for optical communication
3. Guided-wave devices for optical communication
4. Laser‐driven chemical reaction for etching LiNbO3
5. A review of laser–microchemical processing
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1. Self-organized and high-density filamentous nanodomain patterns fabricated in lithium niobate by discharge poling;Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-07-01
2. Etching study of poled lithium tantalate crystal using wet etching technique with ultrasonic assistance;Optical Materials;2008-02
3. Fabrication of Sub-Micron Period Surface Structures in LiNbO3;Ferroelectrics;2007-07-10
4. Damascene technique applied to surface acoustic wave devices;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
5. Fabrication of sub-micron period surface structures in LiNbO3;FERROELECTRICS;2007
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