Residual stresses of diamond and diamondlike carbon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2071451
Reference26 articles.
1. Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering
2. Intrinsic stress and its relaxation in diamond film deposited by hot filament chemical vapor deposition
3. Characterization of boron doped CVD diamond films by Raman spectroscopy and X-ray diffractometry
4. Deposition of diamond-like carbon films using plasma based ion implantation with bipolar pulses
5. Stress-relief behavior in chemical-vapor-deposited diamond films
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