Characterization of carbon films microstructure by atomic force microscopy and Raman spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357474
Reference13 articles.
1. Thin‐film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry
2. Microstructure in thin carbon films
3. Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recording
4. Sidebands in the Luminescence Spectra of Amorphous Hydrogenated Carbon
5. Characterization of as‐prepared and annealed hydrogenated carbon films
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2. Influence of the substrate-electrode applied bias voltage on the properties of sputtered a-C:H thin films;Journal of Physics: Condensed Matter;2001-03-15
3. The scanning tunneling microscopy and scanning tunneling spectroscopy of amorphous carbon;Semiconductors;2000-12
4. Morphological features of diamond-like carbon films deposited by plasma-enhanced CVD;Journal of Non-Crystalline Solids;2000-01
5. Structural and optical properties of amorphous hydrogenated carbon nitride films prepared by plasma-enhanced chemical vapor deposition;Solid State Communications;1997-12
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