Fabrication of tungsten tips with controllable shape by a two-step rapid reciprocating electrochemical etching method

Abstract

Traditional electrochemical etching methods for the needle of a liquid metal ion source (LMIS) easily produce an exponential profile with an uncontrollable tip length and apex radius. Meanwhile, a ledge forms between the needle tip and the needle rod under the etching of the meniscus, which becomes an obstacle for the flow and replenishment of the liquid metal. This paper proposed a two-step rapid reciprocating etching method, which aims to fabricate LMIS tungsten needles with controllable tip length and apex radius, and also with a smooth transition region between the needle tip and the needle rod. In the first step of rough machining, the needle rapidly reciprocates up and down in the electrolyte and rotates to produce a uniform conical profile. However, an ellipsoidal residual portion is generated concomitantly at the needle tip. In the second step of finish machining, the needle shifts down for a given distance and continues to reciprocate until the sharp tip is formed. The tip length fabricated varied from 0.59 to 5.53 mm at different reciprocating strokes. The apex radius ranged from 0.3 to 0.7 µm, and can also be increased to 2 µm by extra reciprocate etching in the electrolyte to meet the LMIS working requirement. A variable named transitivity was defined to quantitatively describe the smoothness of the region between the tip and rod during the etching process. The experimental results showed that a rotation speed of 600 rpm combined with a reciprocating speed of 0.5 mm/s can significantly improve the transitivity of the needle. Those fabricated needle tips have been tested for the indium LMIS and the maximum emission current of the needle tip reached 12 µA.