Control of plasma space potentials and chemical vapor deposition of nanocrystalline diamond films in surface-wave excited low-pressure plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2409761
Reference42 articles.
1. CVD diamond films: from growth to applications
2. Deposition and characterization of nanocrystalline diamond films
3. Field emission from nano-cluster carbon films
4. Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition
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3. Low Temperature Growth of CVD Nanocrystalline Diamond Thin Film by Designed SWP-CVD with Various Working Pressures;Nanoscience and Nanotechnology Letters;2019-09-01
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