High-precision film thickness determination using a laser-based ultrasonic technique-Reference-Cited by-同舟云学术

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High-precision film thickness determination using a laser-based ultrasonic technique

Published:1998-07-13 Issue:2 Volume:73 Page:169-171
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Banet Matthew J.,Fuchs Martin,Rogers John A.,Reinold James H.,Knecht Jeffrey M.,Rothschild Mordechai,Logan Randy,Maznev A. A.,Nelson Keith A.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.121780

Reference14 articles.

1. Real‐time optical characterization of surface acoustic modes of polyimide thin‐film coatings

2. Study of Lamb acoustic waveguide modes in unsupported polyimide thin films using real‐time impulsive stimulated thermal scattering

3. Impulsive stimulated thermal scattering studies of thermally induced cure in thin films of PMDA/ODA

4. Impulsive stimulated thermal scattering studies of thermally induced cure in thin films of PMDA/ODA

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