Remote plasma deposition of aluminum nitride
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348918
Reference21 articles.
1. Epitaxial Growth of Aluminum Nitride on Sapphire Using Metalorganic Chemical Vapor Deposition
2. Growth of aluminium nitride pillar crystals by chemical vapour deposition
3. Optical properties of aluminium nitride prepared by chemical and plasmachemical vapour deposition
4. Aluminium nitride films made by low pressure chemical vapour deposition: Preparation and properties
5. Factors affecting the growth of aluminium nitride layers on sapphire by the reaction of nitrogen with aluminium monoselenide
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