1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , Shanghai 200050, China
2. University of Chinese Academy of Sciences 2 , Beijing 100049, China
3. School of Microelectronics, Shanghai University 3 , 200444 Shanghai, China
4. Shanghai Industrial Technology Research Institute 4 , 201800 Shanghai, China
5. School of Engineering, Brown University 5 , Providence, Rhode Island 02912, USA