Determination of the residual stress tensor in Cu/W multilayers by x‐ray diffraction
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108979
Reference8 articles.
1. X-Ray Diffraction Analysis of Strains and Stresses in Thin Films
2. Elastic strains and coherency stresses in Mo/Ni multilayers
3. Détermination des contraintes résiduelles par diffraction des rayons X dans une couche mince de 1 000 Å de tungstène
4. Tungsten phase transformation induced by low-fluence Ar irradiation in CuW multilayers
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