Molecular-dynamics simulations of steady-state growth of ion-deposited tetrahedral amorphous carbon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373787
Reference39 articles.
1. Transparent carbon film prepared by mass‐separated negative‐carbon‐ion‐beam deposition
2. Growth mechanisms of DLC films from C+ ions: experimental studies
3. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
4. Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy
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