Plasma properties determined with induction loop probes in a planar inductively coupled plasma source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.361025
Reference12 articles.
1. Review of inductively coupled plasmas for plasma processing
2. Electron‐density and energy distributions in a planar inductively coupled discharge
3. Langmuir probe measurements of a radio frequency induction plasma
4. Measurements of electromagnetic fields in a planar radio‐frequency inductively coupled plasma source
5. Spatially resolved optical emission for characterization of a planar radio frequency inductively coupled discharge
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