1. Arifov Institute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan 1 , Tashkent 100125, Uzbekistan
2. School of Engineering 2 , , Tashkent 111221, Uzbekistan
3. Central Asian University 2 , , Tashkent 111221, Uzbekistan
4. Department of Information Technologies, Tashkent International University of Education 3 , Tashkent 100207, Uzbekistan
5. School of Engineering, New Uzbekistan University 4 , Tashkent 100007, Uzbekistan
6. Research group PLASMANT, Department of Chemistry, National Research University TIIAME 5 , Tashkent 100000, Uzbekistan
7. University of Antwerp 6 , Antwerp 2610, Belgium