Arc annealing of BF+2implanted silicon by a short pulse flash lamp
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91279
Reference11 articles.
1. A melting model for pulsing‐laser annealing of implanted semiconductors
2. A computer simulation of laser annealing silicon at 1.06 μm
3. Laser annealing of boron‐implanted silicon
4. Crystalline to amorphous transformation in ion‐implanted silicon: a composite model
5. Laser annealing of diffusion‐induced imperfections in silicon
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