Squeeze air bearing based on ultrasonic oscillation: Motion error compensation using amplitude modulation-Reference-Cited by-同舟云学术

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Squeeze air bearing based on ultrasonic oscillation: Motion error compensation using amplitude modulation

Published:2004-11 Issue:11 Volume:75 Page:4615-4620
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Oiwa Takaaki,Kato Masaya

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1765762

Reference3 articles.

1. Nanometer Positioning Characteristics of Closed Looped Differential Hydro-or Aerostatic Actuator

2. An Active Air Journal Bearing with Ultraprecision, Infinite Static Stiffness, High Damping Capability and New Functions

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1. Study on the Temperature in Air Squeeze Film;Advances in Mechanical Design;2022

2. Near-field acoustic levitation and applications to bearings: a critical review;International Journal of Extreme Manufacturing;2019-09-02

3. Influence of the Disturbance Frequency on the Dynamic Characteristics of an Ultrasonic Gas Squeeze Film;Tribology Transactions;2016-05-24

4. On ultrasonic squeeze film levitation: modeling and feedback control of ultrasonic bearing systems;SPIE Proceedings;2013-04-10

5. An ultrasonic levitation journal bearing able to control spindle center position;Mechanical Systems and Signal Processing;2013-03

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