Measurement method for roll angular displacement with a high resolution by using diffraction gratings and a heterodyne interferometer

Author:

Tang Shanzhi,Wang Zhao,Gao Jianmin,Guo Junjie

Publisher

AIP Publishing

Subject

Instrumentation

Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High-Precision Roll Measurement Method Based on Laser Polarization;International Journal of Precision Engineering and Manufacturing;2024-06-28

2. Dual beam polarization interferometry for roll angular displacement measurement;Measurement;2023-11

3. Machine tool calibration: Measurement, modeling, and compensation of machine tool errors;International Journal of Machine Tools and Manufacture;2023-04

4. 激光多自由度同时测量研究现状与发展趋势;Laser & Optoelectronics Progress;2023

5. An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors;Optical Metrology and Inspection for Industrial Applications IX;2022-12-19

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