1. Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France
2. Univ. Grenoble Alpes, F-38000 Grenoble, France and CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
3. Univ. Grenoble Alpes, IMEP-LAHC, F-38000 Grenoble, France and CNRS, IMEP-LAHC, F-38000 Grenoble, France
4. Applied Materials, 3050 Bowers Avenue, Santa Clara, California 95054, USA