Suspended nanowire web

Author:

Cimalla Volker,Stubenrauch Mike,Weise Frank,Fischer Michael,Tonisch Katja,Hoffmann Martin,Ambacher Oliver

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Self-formation of a nanonet of fluorinated carbon nanowires on the Si surface by combined etching in fluorine-containing plasma;Journal of Physics D: Applied Physics;2018-02-20

2. Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy;Journal of Micromechanics and Microengineering;2013-06-24

3. Black luminescent silicon;physica status solidi (c);2011-01-25

4. Formation of silicon grass: Nanomasking by carbon clusters in cyclic deep reactive ion etching;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-01

5. Elastic properties of nanowires;physica status solidi (b);2010-09-15

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