Ion‐bombardment‐enhanced diffusion during the growth of sputtered superlattice thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90330
Reference11 articles.
1. Interlayer diffusion in InSb/GaSb superlattice structure grown by multitarget rf sputtering
2. Growth of In1−xGaxSb and In1−xAlxSb films by mulsti target R.F. sputtering
3. Multitarget sputtering using decoupled plasmas
4. Multitarget sputtering using decoupled plasmas
5. The influence of static atomic displacements on the diffuse intensity scattered by solid solutions
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