A quantitative model for an interaction between extended dislocation loops and impurities in Czochralski silicon based upon the photoluminescence analysis
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349332
Reference15 articles.
1. A characterization of theP/P+epitaxial and substrate interface using the pulsed metal‐oxide‐semiconductor capacitance‐time transient analysis
2. Effects of Heat‐Treatments on Electrical Properties of Boron‐Doped Silicon Crystals
3. Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon
4. Gettering mechanisms in silicon
5. Gettering in silicon
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