Finite element and analytical solutions for van der Pauw and four-point probe correction factors when multiple non-ideal measurement conditions coexist
Author:
Affiliation:
1. Robert F. Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, USA
2. Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, USA
Funder
Colman Fellowship at Cornell University
GEM Fellowship
National Science Foundation (NSF)
Semiconductor Research Corporation (SRC)
Intel Foundation
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5001830
Reference18 articles.
1. L. J. van der Pauw, “A method of measuring specific resistivity and Hall effect of discs of arbitrary shape,” Philips Res. Rep. 13, 1 (1958).
2. Temperature-dependent thermal conductivities of CMOS layers by micromachined thermal van der Pauw test structures
3. On the van der Pauw’s method applied to the measurement of low thermal conductivity materials
4. Complete Characterization of Thermoelectric Materials by a Combined van der Pauw Approach
5. Efficient thermoelectric van der Pauw measurements
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