Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370608
Reference11 articles.
1. Multilevel-spiral inductors using VLSI interconnect technology
2. Large suspended inductors on silicon and their use in a 2- mu m CMOS RF amplifier
3. Magnetic properties of RF diode sputtered Co/sub x/Fe/sub 100-x/ alloy thin films
4. Design of high frequency inductors based on magnetic films
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