1. Nanofabrication Facility, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences 1 , Suzhou, Jiangsu 215123, China
2. Nano Science and Technology Institute, University of Science and Technology of China 2 , Hefei, Anhui 230026, China
3. Physics Laboratory, Industrial Training Center, Shenzhen Polytechnic 3 , Shenzhen, Guangdong 518055, China
4. School of Electronics and Information Engineering, Wuxi University 4 , Wuxi, Jiangsu 214105, China
5. School of Nano Technology and Nano Bionics, University of Science and Technology of China 5 , Hefei, Anhui 230026, China
6. Nanchang Nano-Devices and Technologies Division, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences 6 , Nanchang, Jiangxi 330200, China