Swift heavy ion irradiation-driven energy band engineering and its profound influence on the photoresponse of β-Ga2O3 ultraviolet photodetectors

Author:

Zhu Huiping1ORCID,Tang Yuanjun12ORCID,Zhong Aoxue2,Wang Lei1ORCID,Liu Fanyu1,Zhao Peixiong3ORCID,Liu Jie3,Shu Lei4,Wu Zhenping2ORCID,Li Bo1ORCID

Affiliation:

1. Institute of Microelectronics and Key Laboratory of Science and Technology on Silicon Devices, Chinese Academy of Sciences 1 , Beijing 100029, China

2. State Key Laboratory of Information Photonics and Optical Communications & School of Science, Beijing University of Posts and Telecommunications 2 , Beijing 100876, China

3. Institute of Modern Physics, Chinese Academy of Sciences 3 , Lanzhou 730000, China

4. Beijing Microelectronics Technology Institute 4 , Beijing 100076, China

Abstract

Swift heavy Ta ions with an ultra-high energy of 2896 MeV are utilized for irradiation of β-Ga2O3 photodetectors. Noteworthy variations in device performance under different wavelengths are observed. Under 254 nm light illumination, the photocurrent of the devices exhibit degradation at low ion fluences but gradually recover and even surpass the performance of non-irradiated devices at the irradiation fluence of 1 × 1010 cm−2. Conversely, under 365 nm light illumination, photocurrent increases at low fluence but slightly decreases at the same high fluence of 1 × 1010 cm−2. Cathodoluminescence spectra and first-principles calculations elucidate the mechanism underlying the evolution of device performance with irradiation fluence. At low irradiation fluence, the introduction of point defects such as oxygen vacancies and gallium vacancies leads to an expansion of the bandgap, resulting in a decline in photocurrent under 254 nm light illumination. Additionally, deep defect levels are generated by these point defects, promoting an enhancement of photocurrent under 365 nm light illumination. Higher fluences transform these point defects into complex defects such as Ga–O pair vacancies, resulting in a reduction in the bandgap. Consequently, an increase in photocurrent is observed for devices illuminated with 254 nm light. However, at high irradiation fluences, charge recombination induced by the presence of deep defect levels becomes more significant, leading to a decrease in photocurrent when exposed to 365 nm light. No matter what, at 1 × 1010 cm−2 fluence, β-Ga2O3 photodetectors still maintain excellent performance, implying their strong radiation resistance and immense potential for application in space environments.

Funder

Youth Innovation Promotion Association

National Natural Science Foundation of China

National Key Research and Development Program of China

Key Project of Frontier Science Research of Chinese Academy of Sciences

Fundamental Research Funds for the Central Universities

Publisher

AIP Publishing

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