1. Institute of Microelectronics and Key Laboratory of Science and Technology on Silicon Devices, Chinese Academy of Sciences 1 , Beijing 100029, China
2. State Key Laboratory of Information Photonics and Optical Communications & School of Science, Beijing University of Posts and Telecommunications 2 , Beijing 100876, China
3. Institute of Modern Physics, Chinese Academy of Sciences 3 , Lanzhou 730000, China
4. Beijing Microelectronics Technology Institute 4 , Beijing 100076, China