Reactive magnetron sputtering of ZnO
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329315
Reference3 articles.
1. Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering
2. Structure and properties of vacuum‐deposited thin films: A new basic relationship
3. Broadband efficient thin‐film Sezawa wave interdigital transducers
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