Texture of TiSi2 thin films on Si (001)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1509849
Reference19 articles.
1. Titanium Silicides and their Technological Applications
2. Kinetic mechanisms of theC49-to-C54 polymorphic transformation in titanium disilicide thin films: A microstructure-scaled nucleation-mode transition
3. In situ x‐ray diffraction analysis of the C49–C54 titanium silicide phase transformation in narrow lines
4. Epitaxial Growth ofTiSi2(C49) on (001)Si by Rapid Thermal Annealing
5. Texture of titanium self-aligned silicide (salicide)
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1. Axiotaxy and epitaxial textures in C54-TiSi2 films on Si(0 0 1) and Si(1 1 1) substrates;Journal of Physics D: Applied Physics;2018-10-01
2. Texture in thin film silicides and germanides: A review;Applied Physics Reviews;2016-09
3. Visualization and classification of epitaxial alignment at hetero-phase boundaries;Thin Solid Films;2016-01
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