Performance of an inverted ion source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4793377
Reference12 articles.
1. Cathodic Arcs
2. Contamination due to memory effects in filtered vacuum arc plasma deposition systems
3. Platinum and gold thin films deposited by filtered vacuum arc: morphological and crystallographic grain sizes
4. A high voltage pulse power supply for metal plasma immersion ion implantation and deposition
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