Reducing the effects of adhesion and friction in microelectromechanical systems (MEMSs) through surface roughening: Comparison between theory and experiments-Reference-Cited by-同舟云学术

Reducing the effects of adhesion and friction in microelectromechanical systems (MEMSs) through surface roughening: Comparison between theory and experiments

Published:2005-10 Issue:7 Volume:98 Page:073528
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Tayebi Noureddine,Polycarpou Andreas A.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2058178

Reference31 articles.

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