Fabrication of ultra-high Q silica microdisk using chemo-mechanical polishing
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, University of Victoria, EOW 448, 3800 Finnerty Rd., Victoria, British Columbia V8P 5C2, Canada
Funder
Natural Sciences and Engineering Research Council of Canada
Defense Threat Reduction Agency
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/am-pdf/10.1063/5.0051674
Reference25 articles.
1. Optical microcavities
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