Effect of gas ratio on tribological properties of sputter deposited TiN coatings-Reference-Cited by-同舟云学术

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Effect of gas ratio on tribological properties of sputter deposited TiN coatings

Published:2016 Issue: Volume: Page:
ISSN:0094-243X
Container-title:AIP Conference Proceedings
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Chavda Mahesh R.,Chauhan Kamlesh V.,Rawal Sushant K.

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Reference25 articles.

1. Ti–N phases formed by reactive ion plating

2. A high rate sputtering process for the formation of hard friction-reducing TiN coatings on tools

3. TiN coatings on steel

4. E. Penilla and J. Wang, “Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering” (HindawiPublishingCorporation Journal of Nano materials, 2008), pp. 1–9.

5. R. L. Hatschek, “Coatings: revolution in HSS tools,” Special Report 752, American Machinist, 1983.

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