Fabrication and characterization of 100‐nm‐thick GaAs cantilevers
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147250
Reference10 articles.
1. Atomic Force Microscopy
2. Force Detection of Nuclear Magnetic Resonance
3. Microfabrication of cantilever styli for the atomic force microscope
4. A Photomicrodynamic System with a Mechanical Resonator Monolithically Integrated with Laser Diodes on Gallium Arsenide
5. Singlemode operation over range –40 – 85°C in 1.55 µm gain-coupled DFB lasers
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