Note: Measuring grating periods by diffraction method with a fore-end light path comprising fused fiber couplers and fiber port collimators
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5005860
Reference16 articles.
1. Groove Density Measurements for the VLS grating by Diffraction Method
2. Determination of groove spacings for concave diffraction gratings
3. Linewidth measurement of gratings on photomasks: a simple technique
4. Linewidth measurement on IC masks and wafers by grating test patterns
5. Laser interferometric diffractometry for measurements of diffraction grating spacing
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3. A proposed method for grating groove density measurement with linear stage by diffraction method;International Conference on Optoelectronic and Microelectronic Technology and Application;2020-12-04
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