Relation between optical property and crystallinity of ZnO thin films prepared by rf magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354091
Reference12 articles.
1. Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering
2. ZnO Thin-Film SAW Devices
3. Crystallographic Character of ZnO Thin Film Formed at Low Sputtering Gas Pressure
4. Optical properties of single‐crystalline ZnO film smoothly chemical‐vapor deposited on intermediately sputtered thin ZnO film on sapphire
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