Model for the vaporization of mixed organometallic compounds in the metalorganic chemical vapor deposition of high temperature superconducting films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110621
Reference7 articles.
1. Comparison of thin films ofYBa2Cu3O7−x deposited by physical (laser ablation) and chemical (OMCVD) methods for device applications
2. Single source metalorganic chemical vapor deposition of low microwave surface resistance YBa2Cu3O7
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