Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas-Reference-Cited by-同舟云学术

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

Published:2021-07-01 Issue:7 Volume:11 Page:075024
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Masheyeva R. U.¹^ORCID,Dzhumagulova K. N.¹^ORCID,Myrzaly M.¹^ORCID,Schulze J.²^ORCID,Donkó Z.³^ORCID

Affiliation:

1. IETP, Al-Farabi Kazakh National University, 71 Al-Farabi Ave., Almaty 050040, Kazakhstan

2. Department of Electrical Engineering and Information Science, Ruhr-University Bochum, D-44780 Bochum, Germany and Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, School of Physics, Dalian University of Technology, Dalian, China

3. Wigner Research Centre for Physics, H1121 Budapest, Hungary

Funder

National Office for Research, Development and Innovation of Hungary

German Research Foundation

National Natural Science Foundation of China

Ministry of Education and Science of the Republic of Kazakhstan

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0055444