Lowering of the conduction threshold by carbon fiber formation in KrF excimer laser irradiated polyimide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112342
Reference12 articles.
1. Ablation of Polymers and Biological Tissue by Ultraviolet Lasers
2. Excimer laser etching of polyimide
3. Threshold behavior in polyimide photoablation: Single-shot rate measurements and surface-temperature modeling
4. Direct laser ablation of sub-100 nm line structures into polyimide
5. Permanent increase of the electrical conductivity of polymers induced by ultraviolet laser radiation
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1. Die singulation technologies for advanced packaging: A critical review;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-07
2. Laser Ablative Patterning of Copoly(imide siloxane)s Generating Superhydrophobic Surfaces;Langmuir;2010-05-06
3. Studies of KrF laser-induced long periodic structures on polyimide;Optics and Lasers in Engineering;2009-01
4. Laser conversion of electrical properties for silicon carbide device applications;Journal of Laser Applications;2001-02
5. Quantification of polyimide carbonization after laser ablation;Journal of Applied Physics;2000-09-15
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