Spatial distributions of electron temperature and density in electron cyclotron resonance discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364262
Reference8 articles.
1. Plasma processing
2. Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma
3. Study of the effect of a probe on the plasma in the source region of an electron cyclotron resonance discharge
4. A two-dimensional, axisymmetric model of a magnetized glow discharge plasma
5. Modeling and simulation of magnetically confined low-pressure plasmas in two dimensions
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