Performance characteristics of the ArF excimer laser using a low‐pressure argon‐rich mixture
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337547
Reference12 articles.
1. Theoretical evaluation of electron‐beam‐excited KrF lasers using argon‐free mixtures of one atmosphere
2. Atmospheric pressure operation of an electron beam excited KrF laser using Kr/F2mixtures
3. Properties of a KrF laser with atmospheric‐pressure Kr‐rich mixture pumped by an electron beam
4. High power uv noble‐gas‐halide laserf
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