Author:
Zhao C. Z.,Zhang J. F.,Zahid M. B.,Groeseneken G.,Degraeve R.,De Gendt S.
Subject
Physics and Astronomy (miscellaneous)
Reference18 articles.
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2. Special reliability features for Hf-based high-/spl kappa/ gate dielectrics
3. Impacts of gate electrode materials on threshold voltage (V/sub th/) instability in nMOS HfO/sub 2/ gate stacks under DC and AC stressing
4. High-<tex>$kappa$</tex>/Metal–Gate Stack and Its MOSFET Characteristics
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