Low‐temperaturein situpreparation of ferroelectric Pb(Zr0.55Ti0.45)O3thin films by reactive sputtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110521
Reference9 articles.
1. Integrated ferroelectrics
2. Ferroelectric Memories
3. Ceramic Thin Films: Fabrication and Applications
4. Effect of the target on the structure and optical properties of radio-frequency sputtered barium titanate films
5. Sputter deposition of highly 〈100+001〉‐textured tetragonal barium titanate on unheated silica using a neon discharge
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4. Effect of substrate temperature on the crystallization of Pb(Zr,Ti)O3 films on Pt/Ti/Si substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target;Materials Science and Engineering: B;2002-07
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