Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors
Author:
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4802250
Reference22 articles.
1. Cooling and Control of a Cavity Optoelectromechanical System
2. Electrostatic actuation of silicon optomechanical resonators
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5. A chip-scale integrated cavity-electro-optomechanics platform
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