Characterizations of the dc discharge plasma during chemical vapor deposition for diamond growth
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99790
Reference6 articles.
1. Vapor Deposition of Diamond Particles from Methane
2. Diamond synthesis from gas phase in microwave plasma
3. Growth of diamond thin films by dc plasma chemical vapor deposition
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