Characterization of a liquid-xenon-jet laser-plasma extreme-ultraviolet source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1755441
Reference24 articles.
1. X-ray and EUV laser-plasma sources based on cryogenic liquid-jet target
2. A liquid-xenon-jet laser-plasma x-ray and EUV source
3. Diffraction-limited soft-x-ray projection imaging using a laser plasma source
4. Nanometer table-top proximity x-ray lithography with liquid-target laser-plasma source
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