Focusing method and apparatus for high-resolution projection patterning-Reference-Cited by-同舟云学术

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Focusing method and apparatus for high-resolution projection patterning

Published:2001 Issue:2 Volume:72 Page:1435
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Rev. Sci. Instrum.

Author:

Popovici D.,Meunier M.

Publisher

AIP Publishing

Subject

Instrumentation

Reference11 articles.

1. Imaging profiles of light intensity in the near field: applications to phase-shift photolithography

2. Diffraction property of an axicon in oblique illumination

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improvement of lateral resolution property of differential confocal system using radial birefringent pupil filter;Fifth International Symposium on Instrumentation Science and Technology;2008-10-02

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