Deposition of stress free c-axis oriented LiNbO3 thin film grown on (002) ZnO coated Si substrate
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4714664
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1. Multilayered LiNbO3 actuator for XY-stage using a shear piezoelectric effect
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