Detection of backside coupled propagating surface plasmon resonance on the sidewall of a wafer

Abstract

We proposed a surface plasmon resonance (SPR) sensor structure that utilized a glass wafer with a diffraction grating and an n-type silicon piece bonded near the SPR coupling site. This configuration enabled surface plasmon excitation from the back of the substrate without the unwanted interaction between the excitation light and the sample, and electrical detection of the SPR response by a 0.7-eV Schottky barrier at the Au/n-Si interface formed on the sidewall of the silicon piece was achieved. Experimental evaluation of the surface plasmon coupling performance was conducted, showing clear peaks in the photocurrent for various wavelengths in the NIR-II window, ranging from 1100 to 1300 nm. The device’s ability to detect propagating surface plasmons as a photocurrent was confirmed; the results indicated a consistent trend with theoretical and numerical calculations. Since the device was composed of a glass substrate, the use of wavelengths shorter than the near-infrared wavelength was possible, including visible wavelengths where the optical absorption by water is negligible. Thus, our proposed sensor provides a compact and efficient solution for SPR sensing in aqueous solutions.