Experimental and numerical investigation of CO2 laser ablation of fused silica with sub-microsecond pulses
Author:
Affiliation:
1. Aix Marseille University, CNRS, Centrale Marseille, Institut Fresnel, Marseille, France
2. CEA-CESTA, 15 Avenue des Sablières, CS 60001, F33116 Le Barp Cedex, France
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0060684
Reference41 articles.
1. Laser polishing and laser shape correction of optical glass
2. Fabrication of a high-quality axicon by femtosecond laser ablation and CO2 laser polishing for quasi-Bessel beam generation
3. Formation mechanism of a smooth, defect-free surface of fused silica optics using rapid CO2 laser polishing
4. Ground fused silica processed by combined chemical etching and CO2 laser polishing with super-smooth surface and high damage resistance
5. Fabrication of a fused silica based mold for the microlenticular lens array using a femtosecond laser and a CO_2 laser
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1. Role of fictive temperature distribution involved in CO2 laser polishing of fused silica and its optimization for achieving even heat-affected zones;Applied Surface Science;2024-10
2. Development of laser fabrication methods for lab-on-a-chip microfluidic multisensing devices in the past decades;Comprehensive Materials Processing;2024
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