1. Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), 76131 Karlsruhe, Germany
2. Department SciTec, University of Applied Sciences, 07745 Jena, Germany
3. Fraunhofer Institute for Applied Optics and Precision Engineering, 07745 Jena, Germany
4. Department of Microsystems Engineering, University of Freiburg, 79110 Freiburg, Germany