1. College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, People's Republic of China
2. The Key Laboratory of Advanced Functional Materials, Ministry of Education of China, Beijing 100124, People's Republic of China
3. Key Laboratory of Micro-Nano Measurement-Manipulation and Physics (Ministry of Education), Department of Physics, Beihang University, Beijing 100191, People's Republic of China
4. Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology. No.100, Pingleyuan, Chaoyang District, Beijing 100124, People's Republic of China
5. School of Microelectronics, Xidian University, Xi'an 710071, People's Republic of China