Uniform subwavelength high-aspect ratio nanogratings on metal-protected bulk silicon produced by laser-induced periodic surface structuring-Reference-Cited by-同舟云学术

Uniform subwavelength high-aspect ratio nanogratings on metal-protected bulk silicon produced by laser-induced periodic surface structuring

Published:2021-11-22 Issue:21 Volume:119 Page:211106
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Bronnikov Kirill¹^ORCID,Dostovalov Alexander¹,Terentyev Vadim¹,Babin Sergey¹,Kozlov Aleksey²^ORCID,Pustovalov Eugeny²^ORCID,Gurevich Evgeny L.³^ORCID,Zhizhchenko Alexey²⁴,Kuchmizhak Aleksandr⁴⁵^ORCID

Affiliation:

1. Institute of Automation and Electrometry of the SB RAS, 1 Acad. Koptyug Ave., 630090 Novosibirsk, Russia

2. Far Eastern Federal University, 8 Sukhanova Str., 690091 Vladivostok, Russia

3. Laser Center (LFM), University of Applied Sciences Münster, Stegerwaldstraße 39, 48565 Steinfurt, Germany

4. Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Science, Vladivostok 690041, Russia

5. Pacific Quantum Center, Far Eastern Federal University, 10 Ajax Bay, 690922 Russky Island, Vladivostok, Russia

Funder

Russian Science Foundation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0075045

Reference35 articles.

1. All-back-contact ultra-thin silicon nanocone solar cells with 13.7% power conversion efficiency

2. Black silicon: fabrication methods, properties and solar energy applications

3. Femtosecond Laser-Induced, Nanoparticle-Embedded Periodic Surface Structures on Crystalline Silicon for Reproducible and Multi-utility SERS Platforms

4. Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications

5. Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

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